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SCI:
34; EI: 62 (as of November 10, 2006)
JOURNAL PUBLICATIONS
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Lu, W.K., Pei, Z.J.,
and Sun, J.G., “Nondestructive evaluation methods for
subsurface damage in silicon wafers: a literature
review,” accepted to appear in
International Journal of Machining and Machinability of
Materials.
-
Lu,
W.K., Pei, Z.J., and Sun, J.G., “Subsurface damage
measurement in silicon wafers with cross-polarization
confocal microscopy,” accepted to appear in
International Journal of Nanomanufacturing.
-
Churi,
N.J., Pei, Z.J.,
Treadwell, C., and
Shorter, D., “Rotary
ultrasonic machining of silicon carbide: designed
experiments,” accepted to appear in
International Journal of Manufacturing Technology and
Management.
-
Wu,
J., Sun, X.K., Pei, Z.J., Xin, X.J., and Simmelink,
K., "Soft-pad grinding of 300 mm wire-sawn silicon wafers:
finite element analysis with designed experiments," accepted
to appear in International Journal of Manufacturing
Technology and Management.
-
Liu,
J.H., Pei, Z.J., and Fisher, G.R., “Investigations of
silicon wafer grinding using finite element analysis,”
accepted to appear in
International Journal of Manufacturing Technology and
Management.
-
Liu,
J.H., Pei, Z.J., and Fisher, G.R., “ELID
grinding of silicon wafers: a literature review,” accepted
to appear in
International Journal of
Machine Tools and Manufacture.
-
Liu,
J.H., Pei, Z.J., and Fisher, G.R., 2007, “Grinding
wheels for manufacturing of silicon wafers: a literature
review,” International Journal of Machine Tools and Manufacture, Vol.
47, No. 1, pp. 1-13.
-
Liu,
J.H., Pei, Z.J., and Fisher, G.R., 2007,
“Experimental investigations of silicon wafer grinding,”
Key Engineering Materials,
Vol. 329, pp. 361-366.
-
Li,
Z.C., Pei, Z.J., and Fisher, G.R., 2006, “Simultaneous
double side grinding of silicon wafers: a literature review,”
International Journal of
Machine Tools and Manufacture, Vol. 46, No. 12-13,
pp. 1449-1458.
-
Li,
Z.C., Cai, L.W., Pei, Z.J., and Treadwell, C.,
2006, “Edge-chipping
reduction in rotary ultrasonic machining of ceramics: finite
element analysis and experimental verification,”
International Journal of
Machine Tools and Manufacture,
Vol. 46, No. 12-13, pp. 1469-1477.
-
Zhang,
X.H., Pei, Z.J., and Fisher, G.R., 2006, “A
grinding–based manufacturing method for silicon wafers:
generation mechanisms of central dimples on ground wafers,”
International Journal of Machine Tools and Manufacture,
Vol. 46, No. 3-4, pp 397–403.
-
Jiao,
Y., Pei, Z.J., Lei, S., Lee, E.S.,
and Fisher, G.R., 2006, “A
fuzzy adaptive network model for waviness removal in
grinding of wire-sawn silicon wafers,”
Journal of Manufacturing Science and Engineering. Vol.
128, No. 4,
pp. 938-943.
-
Churi,
N.J., Pei, Z.J., and
Treadwell, C., 2006,
“Rotary ultrasonic
machining of titanium alloy: effects of machining
variables,”
Machining Science and Technology, Vol. 10, No. 3, pp.
301-321.
-
Sun,
W.P., Pei, Z.J., and Fisher, G.R., 2006, “A
grinding-based manufacturing method for silicon wafers:
generation mechanisms of central bumps on ground wafers,”
Machining Science and Technology, Vol. 10, No. 2, pp.
219–233.
-
Shen,
J.D., Pei, Z.J., Lee, E.S., and Fisher, G.R., 2006,
“Modeling and analysis of waviness reduction in soft-pad
grinding of wire-sawn silicon wafers by support vector
regression,”
International Journal of
Production Research, Vol. 44, No. 13, pp. 2605–2623.
-
Zeng,
W.M., Xu, X.P., and Pei, Z.J.,
2006, “Rotary ultrasonic machining of advanced ceramics,”
Materials Science Forum,
Vols. 532-533, pp. 361-364
-
Y.
Chen, Y., Pei, Z.J., and Treadwell, C., 2006,
“Investigations on edge chipping in rotary ultrasonic
machining using finite element analysis,” Materials Science
Forum, Vols. 532-533, pp. 969-972.
-
Li,
Z.C., Jiao, Y., Deines, T.W., Pei, Z.J., and
Treadwell, C., 2005, “Rotary ultrasonic machining of ceramic
matrix composites: feasibility study and designed
experiments,” International Journal of Machine Tools and
Manufacture, Vol. 45,
Nos. 12–13, pp. 1402–1411.
-
Zeng,
W.M., Li, Z.C., Pei, Z.J., and Treadwell, C., 2005,
“Experimental observation of tool wear in rotary ultrasonic
machining of advanced ceramics,”
International Journal of
Machine Tools and Manufacture, Vol. 45, Nos. 12–13, pp.
1468–1473.
-
Pei,
Z.J., Fisher, G.R., Bhagavat, M., and Kassir, S., 2005,
“A grinding–based manufacturing method for silicon wafers:
an experimental investigation,”
International Journal of
Machine Tools and Manufacture, Vol. 45, No. 10, pp.
1140–1151.
-
Sun,
W.P., Pei, Z.J., and Fisher, G.R., 2005, “Fine
grinding of silicon wafers: effects of chuck shape on
grinding marks,” International Journal of Machine Tools and Manufacture.
Vol. 45, No. 6, pp. 673–686.
-
Sun,
W.P., Pei, Z.J., and Fisher, G.R., 2005, “Fine
grinding of silicon wafers: machine configurations for
spindle angle adjustments,”
International Journal of
Machine Tools and Manufacture, Vol. 45, No. 1, pp.
51–61.
-
Jiao,
Y., Liu, W.J., Pei, Z.J., Xin, X.J., and Treadwell,
C., 2005, “Study on edge chipping in rotary ultrasonic
machining on ceramics: an integration of designed experiment
and FEM analysis,” Journal of Manufacturing Science and
Engineering, Vol. 127, No. 4, pp. 752–758.
-
Jiao,
Y., Pei, Z.J., Lei, S., Lee, E.S., and Fisher, G.R.,
2005, “Fuzzy adaptive network in machining process modeling:
dimensional error prediction for turning operations,”
International Journal of Production Research, Vol. 43, No.
14–15, pp. 2931–2948.
-
Sun,
X.K., Xin, X.J., and Pei, Z.J., 2005, “Finite element
analysis of die–strength testing configurations for thin
semiconductor wafers,”
Journal of Electronic Packaging, Vol. 127, No. 2, pp.
189–192.
-
Jiao,
Y., Hu, P.,
Pei, Z.J.,
and Treadwell, C., 2005, “Rotary ultrasonic machining
of ceramics: design of experiments,”
International Journal of Manufacturing Technology and
Management, Vol. 7, Nos. 2–4, pp. 192–206.
-
Li,
Z.C., Jiao, Y., Deines, T.W., Pei, Z.J., and
Treadwell, C., 2005, “Development of an innovative coolant
system for rotary ultrasonic machining,” International
Journal of Manufacturing Technology and Management, Vol. 7,
Nos. 2–4, pp. 318–328.
-
Jiao,
Y., Lei, S., Pei, Z.J., and Lee, E.S., 2004, “Fuzzy
adaptive networks in machining process modeling: surface
roughness prediction for turning operations,”
International Journal of Machine Tools and Manufacture, Vol. 44,
No. 15, pp. 1643–1651.
-
Sun,
W.P., Pei, Z.J., and Fisher, G.R., 2004, “Fine
grinding of silicon wafers: a mathematical model for the
wafer shape,” International Journal of Machine Tools and Manufacture,
Vol. 44, Nos. 7–8, pp. 707–716.
-
Pei,
Z.J., Kassir, S., Bhagavat, M., and Fisher, G.R., 2004,
“An experimental investigation into soft–pad grinding of
wire–sawn silicon wafers,”
International Journal of
Machine Tools and Manufacture, Vol. 44, Nos. 2–3, pp.
297–304.
-
Sun,
X.K., Pei, Z.J., Xin, X.J., and Fouts, M., 2004,
"Waviness removal in grinding of wire–sawn silicon wafers:
3D finite element analysis with designed experiments,"
International Journal of
Machine Tools and Manufacture, Vol. 44, No. 1, pp.
11–19.
-
Xin,
X.J., Pei, Z.J., and Liu, W.J., 2004, “Finite element
analysis on soft–pad grinding of wire–sawn silicon wafers,”
Journal of Electronic Packaging,
Vol. 126, No. 2, pp. 177–185.
-
Sun,
X.K., Pei, Z.J., and Xin, X.J., 2004, “Waviness
removal in grinding of wire–sawn silicon wafers:
three–dimensional finite element analysis,”
International Journal of Advanced Manufacturing Systems,
Vol. 7, No. 2, pp. 21-30.
-
Chidambaram,
S., Pei, Z.J., and
Kassir, S.,
2003, “Fine grinding of silicon wafers: a
mathematical model for grinding marks,”
International Journal of
Machine Tools and Manufacture, Vol. 43, No. 15, pp.
1595–1602.
-
Chidambaram,
S., Pei, Z.J., and
Kassir, S.,
2003, “Fine grinding of silicon wafers: a
mathematical model for the chuck shape,”
International Journal of
Machine Tools and Manufacture, Vol. 43, No. 7, pp. 739–746.
-
Pei,
Z.J., Xin, X.J.,
and Liu, W.J., 2003, “Finite
element analysis for grinding of wire–sawn silicon wafers: a
designed experiment,”
International Journal of
Machine Tools and Manufacture, Vol. 43, No. 1, pp. 7–16.
-
Pei,
Z.J., 2002, “A
Study on surface grinding of 300 mm silicon wafers,”
International
Journal of Machine Tools and Manufacture,
Vol. 42, No. 3, pp. 385–393.
-
Pei,
Z.J., and Strasbaugh, A., 2002, “Fine
grinding of silicon wafers: designed experiments,”
International Journal of Machine Tools and Manufacture,
Vol. 42, No. 3, pp. 395–404.
-
Liu,
W.J., Pei, Z.J., and Xin, X.J., 2002, “Finite element
analysis for grinding and lapping of wire–sawn silicon
wafers,”
Journal of Materials Processing Technology, Vol.
129, Nos. 1–3, pp. 2–9.
-
Hu,
P., Zhang, J.M., Pei, Z.J., and Treadwell, C., 2002,
“Modeling of material removal rate in rotary ultrasonic
machining: designed experiments,”
Journal of Materials
Processing Technology, Vol. 129, Nos. 1–3, pp.
339–344.
-
Pei,
Z.J., and Strasbaugh, A., 2001, “Fine
grinding of silicon wafers,”
International
Journal of Machine Tools and Manufacture, Vol. 41, No. 5,
pp. 659–672.
-
Pei,
Z.J., and
Ferreira, P.M., 1999, “An experimental investigation of
rotary ultrasonic face milling,” International Journal of
Machine Tools and Manufacture,
Vol. 39, No. 8, pp.
1327–1344.
-
Pei,
Z.J., Billingsley, S.R., and Miura, S, 1999, “Grinding–induced
subsurface cracks in silicon wafers,” International Journal
of Machine Tools and Manufacture, Vol. 39, No. 7, pp.
1103–1116.
-
Pei,
Z.J, and
Ferreira, P.M., 1998, “Modeling of ductile mode material
removal in rotary ultrasonic machining,” International
Journal of Machine Tools and Manufacture, Vol. 38, Nos.
10–11, pp. 1399–1418.
-
Pei,
Z.J., Prabhakar, D., Ferreira, P.M., and Haselkorn,
M., 1995, “A mechanistic approach to the prediction of
material removal rates in rotary ultrasonic machining,”
Journal of Engineering for Industry, Vol. 117, No. 2,
pp. 142–151.
-
Pei,
Z.J., Ferreira, P.M., Kapoor, S.G., and Haselkorn, M., 1995, “Rotary ultrasonic
machining for face milling of ceramics," International
Journal of Machine Tools and Manufacture, Vol. 35, No. 7,
pp. 1033–1046.
-
Pei,
Z.J., Ferreira, P.M., and Haselkorn, M., 1995, “Plastic flow in rotary
ultrasonic machining of ceramics,” Journal of materials
Processing Technology, Vol. 48, Nos. 1–4, pp. 771–777.
-
Rubenstein,
C., Lau, W.S., Pei, Z.J., and Wang, M., 1989, “The
torque and thrust arising from contact at the lips in spade
drilling of ductile metals,” International Journal of
Machine Tools and Manufacture, Vol. 29, No. 3, pp. 453 –467.
<Return to the top>
PUBLICATIONS IN PEER–REVIEWED TRANSACTIONS AND PROCEEDINGS
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Zhang,
X.H., Pei, Z.J., and Fisher, G.R., 2005,
“Chemical mechanical polishing of silicon wafers: finite
element analysis of wafer flatness,” CD–ROM Proceedings of
the International Mechanical Engineering Congress and
Exposition 2005 (IMECE 2005), Orlando, FL, November 6–11.
-
Churi,
N.J., Li, Z.C., Pei, Z.J., and Treadwell, C., 2005,
“Rotary ultrasonic machining of titanium alloy: a
feasibility study,” CD–ROM Proceedings of the International
Mechanical Engineering Congress and Exposition 2005 (IMECE
2005), Orlando, FL, November 6–11.
-
Li,
Z.C., Pei, Z.J., Zeng, W.M., Kwon, P., and Treadwell,
C., 2005, “Preliminary experimental study of rotary
ultrasonic machining on zirconia toughened alumina,”
Transactions of the North American Manufacturing Research
Institution of SME, Vol. 33, pp. 89–96.
-
Sun,
W.P., Pei, Z.J., Lee, S.E., and Fisher, G.R., 2005,
“Optimization of process parameters in manufacturing: an
ELECTRE approach,” Transactions of the North American Manufacturing Research
Institution of SME, Vol. 33, pp. 187–194.
-
Churi,
N.J., and Pei, Z.J., 2004, “Experimental
investigations into jig grinding,” Progress of Machining
Technology – Proceedings of the Seventh International
Conference on Progress of Machining Technology, ICPMT'2004,
Suzhou, China, December 8–11, pp. 219–224.
-
Zeng,
W.M., Li, Z.C., Pei, Z.J., and Treadwell, C., 2004,
“Tool wear in rotary ultrasonic machining of advanced
ceramics,” Progress of Machining Technology – Proceedings of
the Seventh International Conference on Progress of
Machining Technology, ICPMT'2004, Suzhou, China, December
8–11, pp. 392–397.
-
Li,
Z.C., Cai, L.W.,
Pei, Z.J.,
and Treadwell, C., 2004, “Finite element simulation of
rotary ultrasonic machining for advanced ceramics,”
CD–ROM Proceedings of the International Mechanical
Engineering Congress and Exposition 2004 (IMECE 2004),
Anaheim, CA, November 13–19.
-
Zeng,
W.M., Li, Z.C.,
Pei, Z.J.,
and Treadwell, C., 2004, “Experimental investigation
into rotary ultrasonic machining of alumina,”
CD–ROM Proceedings of the International Mechanical
Engineering Congress and Exposition 2004 (IMECE 2004),
Anaheim, CA, November 13–19.
-
Zhang,
J.M., Sun, J.G., and
Pei, Z.J.,
2004, “Optical transmission properties of silicon
wafers: theoretical analysis,” CD–ROM Proceedings of the
International Mechanical Engineering Congress and Exposition
2004 (IMECE 2004), Anaheim, CA, November 13–19.
-
Pei,
Z.J., Fisher, G.R., and Strasbaugh, A., 2004, “Fine
grinding of silicon wafer: benefits and technical barriers,”
Transactions of the
North American Manufacturing Research Institution of SME,
Vol. 32, pp. 479–488.
-
Zhang,
J.M., Sun, J.G., and Pei, Z.J., 2004, “Optical
transmission properties of silicon wafers: experimental
study,”
Transactions of The North American Manufacturing Research Institution of
SME, Vol.
32, pp. 471–478.
-
Li,
Z.C., Jiao, Y., Deines, T.W.,
Pei, Z.J.,
and Treadwell, C., 2004, “Experimental study on
rotary ultrasonic machining (RUM) of poly crystalline
diamond compacts (PDC),”
CD–ROM Proceedings of the 13th Annual Industrial
Engineering Research Conference (IERC–2004), Houston, TX,
May 15–19.
-
Namala,
S., Collins, R., and
Pei, Z.J., 2004,
“Implementing lean thinking concepts in high product mix
manufacturing organizations,” CD–ROM Proceedings of
the 13th Annual Industrial Engineering Research Conference (IERC–2004),
Houston, TX, May 15–19.
-
Zhang,
J.M., Sun, J.G., and Pei, Z.J., 2003, “Application of
laser scattering on detection of subsurface damage in
silicon wafers,” CD–ROM Proceedings of the International
Mechanical Engineering Congress and Exposition 2003 (IMECE
2003), Washington, DC, November 16–21, also in American
Society of Mechanical Engineers (Publication) NDE, Vol. 24,
2003, pp. 15–24.
-
Jiao,
Y., Wu, J., Lei, S., Pei, Z.J., and Lee, S., 2003,
“Application of fuzzy adaptive networks in manufacturing:
waviness removal in grinding of wire–sawn silicon wafers,”
CD–ROM Proceedings of the International Mechanical
Engineering Congress and Exposition 2003 (IMECE 2003),
Washington, DC, November 16–21.
-
Zhang,
J.M., Pei, Z.J., and Sun, J.G., 2003, “Calibration
tests of laser scattering in subsurface damage
measurements,” Transactions of the North American Manufacturing Research
Institution of SME, Vol. 31, pp. 563–570, also SME
Technical Paper, MS03–213, Society of Manufacturing
Engineers, Dearborn, MI.
-
Zhang,
J.M., Pei, Z.J., and Sun, J.G., 2003, “Experimental
study on set–up parameters of laser scattering system,”
CD–ROM Proceedings of the 12th Annual Industrial Engineering
Research Conference (IERC–2003), Portland, OR, May 18–20.
-
Hu,
P., Wilson, C., and Pei, Z.J., 2003, “An experimental
investigation into machinability of a refractory composite
material,” CD–ROM Proceedings of the 12th Annual Industrial
Engineering Research Conference (IERC–2003), Portland, OR,
May 18–20.
-
Hanna,
S., Deines, T., Menon, S., Lei, S., and Pei, Z.J.,
2003, “Experimental assessment of machining processes for a
new composite material,”
CD–ROM Proceedings of the 12th Annual Industrial
Engineering Research Conference (IERC–2003), Portland, OR,
May 18–20.
-
Wu.
J., Sun, X.K., Pei, Z.J., and Xin, X.J., 2003,
“Soft–pad grinding of wire–sawn silicon wafers: finite
element analysis using 25 factorial design,”
CD–ROM Proceedings of the 12th Annual Industrial Engineering
Research Conference (IERC–2003), Portland, OR, May 18–20.
-
Jiao,
Y., Pei, Z.J.,
Lei, S., and,
Lee, E.S.,
2003, “Fuzzy
adaptive networks in the modeling and forecasting of
manufacturing processes,” CD–ROM Proceedings of the 12th
Annual Industrial Engineering Research Conference (IERC–2003),
Portland, OR, May 18–20.
-
Pei,
Z.J., and Strasbaugh, A., 2002, “Fine grinding of
silicon wafers: grinding marks,”
CD–ROM Proceedings of the International Mechanical
Engineering Congress and Exposition 2002 (IMECE 2002), Vol.
2, New Orleans, LA, November 17–22.
-
Xin,
X.J., Pei, Z.J., and Liu, W.J., 2002, “Finite
element analysis on soft–pad grinding of wire–sawn silicon
wafers,” CD–ROM
Proceedings of the International Mechanical Engineering
Congress and Exposition 2002 (IMECE 2002), Vol. 2, New
Orleans, LA, November 17–22.
-
Zhang,
J.M., Pei, Z.J., and Sun, J.G., 2002, "Measurement of
subsurface damage in silicon wafers," Proceedings of the 6th
International Conference on Progress of Machining Technology
(ICPMT6), Xi'an, Shanxi, China, September 10–14, pp.
715–720.
-
Chidambaram,
S., Pei, Z.J., and Yu, Q.X., 2002, “Back grinding of
silicon wafers,” Proceedings of the 6th International
Conference on Progress of Machining Technology (ICPMT6),
Xi'an, Shanxi, China, September 10–14, pp. 301–306.
-
Zhang,
J.M., Sun, J.G., and Pei, Z.J., 2002, “Subsurface
damage measurement in silicon wafers by laser scattering,”
Transactions of the
North American Manufacturing Research Institution of SME,
Vol. 30, pp. 535–542, also SME Technical Paper,
MS02–173, Society of Manufacturing Engineers, Dearborn, MI.
-
Pei,
Z.J., and Fisher, G., 2001, “Surface grinding in
silicon wafer manufacturing,”
Transactions of the North American Manufacturing Research Institution of
SME, Vol. 29, pp. 279–286, also SME Technical Paper,
MR01–271, Society of Manufacturing Engineers, Dearborn, MI.
-
Pei,
Z.J., Prabhakar, D., Ferreira, P.M., and Haselkorn,
M., 1995, “Rotary ultrasonic drilling and milling of
ceramics,”
Ceramic Transactions, Vol. 49, Manufacture of Ceramic
Components, American Ceramic Society, Westerville, OH,
pp. 185–196.
-
Pei,
Z.J., Khanna, N., and Ferreira, P.M., 1995, “An investigation into rotary
ultrasonic machining of structural ceramics: a review,”
Ceramic Engineering and Science Proceedings, Vol. 16, No. 1,
pp. 259–278.
-
Khanna,
N., Pei, Z.J., and Ferreira, P.M., 1995, “An
experimental investigation of rotary ultrasonic grinding of
ceramic disks,” Technical Papers of the North American
Manufacturing Research Institution of SME, pp. 67–72,
also SME Technical Paper, MR95–141, Society of Manufacturing
Engineers, Dearborn, MI.
-
Prabhakar,
D., Pei, Z.J., Ferreira, P.M., and Haselkorn, M.,
1993, “A theoretical model for predicting material removal
rates in rotary ultrasonic machining of ceramics,”
Transactions of the North American Manufacturing Research
Institution of SME, Vol. 21, pp. 167–172.
<Return to the top>
PUBLICATIONS
IN CONFERENCE PROCEEDINGS AND INDUSTRIAL MAGAZINES
-
Churi, N.J., Pei, Z.J., and
Treadwell, C., 2007, “Experimental
investigations on rotary ultrasonic machining of
hard-to-machine materials,” accepted to appear in
Proceedings of Materials Processing under the Influence
of External Fields, 2007 TMS Annual Meeting &
Exhibition, Orlando, FL, February 25 - March 1, edited
by Q.Y. Han, G. Ludtka, Q.J. Zhai, the Minerals, Metals
& Materials Society.
-
Churi,
N.J., Pei, Z.J., and
Treadwell, C., 2006, “Rotary
ultrasonic machining of titanium alloy (Ti-6Al-4V): effects
of tool variables,” Proceedings of the International
Conference on Manufacturing Science and Technology (
ICOMAST'06), August 28-30, 2006, Melaka, Malaysia.
-
Zhang,
X.H., Pei, Z.J., and Xin, X.J., 2006, “Soft-pad
grinding of wire-sawn wafers: 2005 progress report,” CD–ROM
Proceedings of the 2006 NSF Design, Service and
Manufacturing Grantees and Research Conference, St. Louis,
MO, July 24-27.
-
Liu,
J.H., Pei, Z.J., and Fisher, G.R., 2006, “Fundamental
research on silicon wafer fine grinding: 2005 progress
report,” CD–ROM Proceedings of the 2006 NSF Design, Service
and Manufacturing Grantees and Research Conference, St.
Louis, MO, July 24-27.
-
Lu,
W.K., Pei, Z.J., and Sun, J.G., 2006, “Innovative
laser-based techniques for characterization of subsurface
cracks in semiconductor wafers: progress report,” CD–ROM
Proceedings of the 2006 NSF Design, Service and
Manufacturing Grantees and Research Conference, St. Louis,
MO, July 24-27.
-
Zhang,
X.H., Pei, Z.J., Xin, X.J., and Sun, X.K., 2005,
“Three–dimensional FEA of soft–pad grinding of wire–sawn
silicon wafers: effects of pad parameters,” CD–ROM
Proceedings of the 2005 NSF Design, Service and
Manufacturing Grantees and Research Conference, Scottsdale,
AZ, January 3–6.
-
Sun,
W.P., Pei, Z.J., and Fisher, G.R., 2005, “Fine
grinding of silicon wafers: 2004 progress report,” CD–ROM
Proceedings of the 2005 NSF Design, Service and
Manufacturing Grantees and Research Conference, Scottsdale,
AZ, January 3–6.
-
Li,
Z.C., Jiao, Y., Deines, T.W.,
Pei, Z.J.,
and Treadwell, C., 2004, “Rotary ultrasonic machining
(RUM) on ceramic matrix composites (CMC): Designed
experiments,” Proceedings of the Fifth International
Conference on High Temperature Ceramic Matrix Composites (HTCMC–5),
Seattle, WA, September 12–16.
-
Shen,
J.D., Pei, Z.J., and Lee, E.S., 2004, “Support vector
regression in the analysis of soft–pad grinding of wire–sawn
silicon wafers,” Proceedings of the joint meeting of the
International Conference on Cybernetics and Information
Technologies, Systems and Applications (CITSA 2004) and the
10th International Conference on Information Systems
Analysis and Synthesis (ISAS 2004), Orlando, FL, July 21–25.
-
Pei,
Z.J., Xin,
X.J., and Sun, X.K., 2004, “Soft–pad grinding of 300
mm wire–sawn silicon wafers: effects of soft pad
parameters,” Proceedings of the
6th International
Conference on Frontiers of Design and Manufacturing, Xi’an,
China, June 21–23.
-
Zeng,
W.M., Li, Z.C.,
Pei, Z.J.,
and Treadwell, C., 2004, “Rotary ultrasonic machining
of advanced ceramics: effects of coolant,” Proceedings of
the 6th International
Conference on Frontiers of Design and Manufacturing, Xi’an,
China, June 21–23.
-
Li,
Z.C., Treadwell, C.,
and Pei, Z.J.,
2004, “Drilling small holes in hard–to–machine
materials by rotary ultrasonic machining,” CD–ROM
Proceedings of WESTEC Conference–New Frontiers in
Manufacturing Technology, Los Angeles, CA, March 22–25, also
SME Technical Paper TP04PUB137, Society of Manufacturing
Engineers, Dearborn, MI.
-
Pei,
Z.J., Xin, X.J., Liu, W., Wu, J., Sun, X.K., Simmelink,
K., and Fouts, M., 2004, “Soft–pad grinding of wire–sawn
silicon wafers: progress report,” CD–ROM Proceedings of the
2004 NSF Design, Service and Manufacturing Grantees and
Research Conference, Dallas, TX, January 5–8.
-
Xin,
X.J., Sun, X.K., and Pei, Z.J., 2003, “Grinding of
300 mm silicon wafers: finite element analysis of waviness
removal,” Proceedings of the International Conference on
Leading Edge Manufacturing in 21th Century (LEM21), Niigata,
Japan, November 3–6, 2003.
-
Treadwell,
C, and
Pei, Z.J.,
2003, “Machining
ceramics with rotary ultrasonic machining,”
Ceramic Industry, June 2003, pp. 39–42.
-
Pei,
Z.J., Strasbaugh, A., and Puthanangady, T., 2003,
“Thermal aspects in grinding of silicon wafers,” Proceedings
of the NSF Workshop on Research
Needs in Thermal Aspects of Material Removal Processes,
Stillwater, OK, June 10–12, pp. 375–380.
-
Hu,
P., Zhang, J.M., Jiao, Y., Pei, Z.J., and Treadwell,
C., 2003, “Experimental investigation on coolant effects in
rotary ultrasonic machining,” Proceedings of
the NSF Workshop on Research Needs
in Thermal Aspects of Material Removal Processes,
Stillwater, OK, June 10–12, pp. 340–345.
-
Jiao,
Y., Hu, P., Pei, Z.J.,
Lei, S., and Lee, E.S., 2003, “Application of fuzzy adaptive
networks in manufacturing: prediction of material removal
rate in rotary ultrasonic machining,” Intelligent
Engineering Systems Through Artificial Neural Networks, Vol.
13, Smart Engineering System Design: Neural Networks, Fuzzy
Logic, Evolutionary Programming, Complex Systems and
Artificial Life – Proceedings of the Artificial Neural
Networks in Engineering Conference, St. Louis, MO, November
2–5, 2003, pp. 491–496.
-
Wu,
J., Liu, W.J., Sun, X.K., Xin, X.J., and Pei, Z.J.,
2003, “Soft–pad grinding of wire–sawn silicon wafers: finite
element analysis using 24 factorial design,”
CD–ROM Proceedings of the 2003 NSF Design, Service and
Manufacturing Grantees and Research Conference, Birmingham,
AL, January 6–9.
-
Xin,
X.J., Liu, W.J., and Pei, Z.J., 2002, “Modeling of
waviness reduction in silicon wafer grinding by finite
element method,” Proceedings of the International Conference
on Modeling and Analysis of Semiconductor Manufacturing (MASM
2002), Tempe, AZ, April 10–12, pp. 24–29.
-
Chidambaram,
S. and
Pei, Z.J.,
2002, “A predictive model for grinding mark patterns
in semiconductor wafer grinding,”
Proceedings of the International Conference on
Modeling and Analysis of Semiconductor Manufacturing (MASM
2002), Tempe, AZ, April 10–12, pp. 30–35.
-
Chidambaram,
S. and Pei, Z.J., 2001, “A study of grinding marks in
semiconductor wafer grinding,”
Proceedings of the 16th American Society for Precision
Engineering Annual Meeting, Arlington, VA, November
10–15, pp. 393–396.
-
Fisher,
G., and Pei, Z.J., 1998, “Challenges for 300
mm polished wafer manufacturers,”
Silicon Wafer Symposium, Portland, OR, Sept 28–29, pp.
J1–J9.
-
Tricard,
M., Kassir, S., Herron, P., and Pei, Z.J., 1998, “New
abrasive trends in manufacturing of silicon wafers,” Silicon
Machining Symposium, American Society For Precision
Engineering, St. Louis, MO, April.
-
Pei,
Z.J., Khanna, N., and Ferreira, P.M., 1995, “A study on material removal
mechanisms in rotary ultrasonic machining of ceramics,”
Proceedings of the 11th International Symposium for
ElectroMachining, ISEM–XI, Lausanne, Switzerland, April
17–21, pp. 839–848.
-
Shirkey,
P.R., Pei, Z.J., and Ferreira, P.M., 1994,
“Application of stochastic geometry in characterizing random
phenomena in material removal processes,” Proceedings of the
First S. M Wu Symposium on Manufacturing Science, Evanston,
IL, May 27–28, pp. 177–183.
-
Pei,
Z.J., and Lau, W.S., 1989, “A new model of v–cutting,”
Proceedings of the Fourth International Conference on Metal
Cutting, Non–Conventional Machining and Their Automation,
April, Beijing, China, Vol. 1, pp. C197–202.
-
Zhou,
L.Y., Yu, Q.X., and Pei, Z.J., 1989, “Failure
mechanism of the coated carbide tool,” Proceedings of the
Fourth International Conference on Metal Cutting,
Non–Conventional Machining and Their Automation, Beijing,
China, April, Vol. 1, pp. C203–207.
-
Rubenstein,
C., Lau, W.S., Pei, Z.J., and Wang, M., 1989,
“Evaluation of cutting forces in spade drill,” Proceedings
of the Fourth International Conference on Metal Cutting,
Non–Conventional Machining and Their Automation, Beijing,
China, April, Vol. 2, pp. C245–262.
-
Wang,
Y.M., Pei, Z.J., and Shen, W.Q., 1987, “On the
cutting performance of new types of home–made HSS,”
Proceedings of the Third International Conference on Metal
Cutting, Non–Conventional Machining and Their Automation,
Nanjing, China, May, pp. 1–13.
<Return to the top>
EDUCATIONAL
PAPERS AND PRESENTATIONS
-
Pei,
Z.J., 2006, “Using Hollywood movies as a supplementary
tool to teach manufacturing processes,” CD-ROM Proceedings
of the 2006 ASEE Annual Conference & Exposition, June 18-21,
2006, Chicago, IL. (This paper has received a nomination for
best paper.)
-
Zhang,
J.M., and Pei, Z.J., 2006, “Experience with
interactive methods in manufacturing courses,” CD-ROM
Proceedings of the 2006 ASEE Annual Conference & Exposition,
June 18-21, 2006, Chicago, IL.
-
Pei,
Z.J. 2006, “Using Hollywood movies as a supplementary
lecture tool,” Presentation at the Third Annual K-State
Teaching Renewal Retreat, Manhattan, KS, January 9.
-
Sun,
W.P., Zhang, J.M., and Pei, Z.J., 2005,
“Enhancement of students’ learning in large classes,” CD–ROM
Proceedings of the 40th ASEE Midwest Section Conference and
Workshops, Fayetteville, AR, September 14–16.
-
Sun,
W.P., Zhang, J.M., and Pei, Z.J., 2005,
“Teaching lean manufacturing by learner-centered methods,”
CD–ROM Proceedings of the 40th ASEE Midwest Section
Conference and Workshops, Fayetteville, AR, September 14–16.
-
Pei,
Z.J., 2003, “Experience of using multimedia during
classroom lectures,” CD–ROM Proceedings of the 38th ASEE
Midwest Section Conference and Workshops, Rolla, MO,
September 10–12.
-
Pei,
Z.J., and Mayfield,
C., 2003, “Extension of classroom to a local manufacturing
company,” CD–ROM Proceedings of the 38th ASEE Midwest
Section Conference and Workshops, Rolla, MO, September
10–12.
-
Deines,
T., Hanna, S., Pei, Z.J., and Wilson, C., 2002,
“Experience of innovations in a manufacturing process
laboratory course,” CD–ROM Proceedings of the 37th ASEE
Midwest Section Conference and Workshops, Norman, OK,
September 12–13.
-
Pei,
Z.J., Hanna, S.,
Deines, T., and Lei, S., 2002, “Experience in
technology–based instruction and active learning for a
manufacturing course,” Transactions of the Committee of
Manufacturing Engineering Chairs/Coordinators (COMEC), Vol.
1, pp. 38–45, also SME Technical Paper, ED02–259, Society of
Manufacturing Engineers, Dearborn, MI.
<Return to the top>
CONFERENCE PRESENTATIONS AND INVITED TALKS
-
Pei,
Z.J., 2006, “Silicon
wafer grinding and rotary ultrasonic machining,” invited
talk to the Key Laboratory for Advanced Ceramics and
Machining Technology of Ministry of Education, School of
Mechanical Engineering, Tianjin University, China, May 23.
-
Pei,
Z.J., 2006, “Tips on writing ‘high-quality’ journal
papers,” invited talk to the Key Laboratory for Precision
and Non-traditional Machining Technology of the Ministry of
Education, School of Mechanical Engineering, Dalian
University of Technology, China, May 20.
-
Pei,
Z.J., 2006, “Graduate Education at Kansas State
University and silicon wafer grinding,” invited talk to the
Key Laboratory for Precision and Non-traditional Machining
Technology of the Ministry of Education, School of
Mechanical Engineering, Dalian University of Technology,
China, May 18.
-
Pei,
Z.J., 2006, “Engineering undergraduate education in the
USA,” invited talk to School of Mechanical Engineering,
Zhengzhou University, China, May 15.
-
Pei,
Z.J., 2006, “Challenges in grinding of silicon wafers,”
invited talk to the Key Laboratory for Stone Machining of
Fujian Providence, School of Mechanical Engineering, Huaqiao
University, Quanzhou, China, May 12.
-
Pei,
Z.J., 2006, “Manufacturing research and education in the
USA,” invited talk to School of Mechanical Engineering,
Zhengzhou University, China, May 11.
-
Pei,
Z.J., 2006, “Machine configurations for silicon wafer
grinding,” Mechanical & Materials Engineering Symposium,
Washington State University, April 13.
-
Pei,
Z.J., 2006, “Grinding wheels for manufacturing of
silicon wafers: a literature review,” invited talk to MEMC
Electronic Materials, Inc., St. Peters, MO, January 5.
-
Pei,
Z.J., 2005, “Advancement on silicon wafer grinding,”
invited talk to Manufacturing Engineering Seminar, Worcester
Polytechnic University, November 17.
-
Lu,
W.K., Pei, Z.J., and Fisher, G.R.,
2005, “Decomposition
analysis of surface features on ground silicon wafers,”
presentation at the International Mechanical
Engineering Congress and Exposition 2005 (IMECE 2005),
Orlando, FL, November 6–11.
-
Pei,
Z.J., 2005, “Challenges in grinding of silicon wafers,”
invited talk to Diamond Innovations, Inc., Worthington, OH,
July 26.
-
Pei,
Z.J., 2005, “Research issues in wafer grinding and
rotary ultrasonic machining,” presentation at the NSF
Workshop on Science and Technologies for Manufacturing
Machines and Processes, Lincoln, NE, July 19–21.
-
Pei,
Z.J., 2005, “Machine configurations for spindle angle
adjustments in silicon wafer grinding,” invited talk to the
Northboro Research and Development Center of Saint–Gobain,
Northboro, MA, June 21.
-
Pei,
Z.J., 2005, “Central dimples and bumps on ground silicon
wafers,” invited talk to the Northboro Research and
Development Center of Saint–Gobain, Northboro, MA, May 26.
-
S.
Udayagiri, and Pei, Z.J., 2004, “Value stream
analysis in a manufacturing company,” presentation at the
INFORMS Annual Meeting, Denver, CO, October 24–27.
-
Pei,
Z.J., 2003, “Fine grinding of silicon wafer: benefits
and challenges,” invited talk to Saint–Gobain Abrasives,
Inc., Worcester, MA, August 7.
-
Pei,
Z.J., Hanna, S., and Liu, D., 2002, “Interventions and
Kaizen events,” two–week long training at Shunde Special
Transformer Works, Shunde, Guangdong, China, July 29 –
August 9.
-
Pei,
Z.J., and Hanna, S., 2002, “Interventions,”
invited talk to Beijing Zhongli Chemical Fiber Machinery
Co., Ltd., Beijing, China, July 26.
-
Pei,
Z.J., 2002, “Technology–based instruction and active learning for a
manufacturing course,” invited talk to the Industrial
Engineering Department at
Tsinghua University, Beijing, China, July 25.
-
Pei,
Z.J.,
2002, “Challenges
in fine grinding of silicon wafers,”
invited talk to the Industrial Engineering Department at
Tsinghua University, Beijing, China, July 25.
-
Pei,
Z.J., 2002, “Process–induced subsurface damage and
waviness in silicon wafers,” invited talk to the
Manufacturing Metrology Division of the
Manufacturing Engineering Laboratory,
National Institute of Standards and Technology,
Gaithersburg, MD, May 17.
-
Pei,
Z.J., and Strasbaugh, A., 2002,
“Fine grinding of silicon wafers: past and future,”
presentation at the ASPE 2002 Spring Topical Meeting
–
Progress in Precision, Raleigh, NC, April 17–18.
-
Chidambaram,
S., and Pei, Z.J., 2001, “Back grinding of silicon
wafers: a review,” presentation at the 103rd American
Ceramic Society Annual Meeting and Exposition, Indianapolis,
IN, April 22–25.
-
Pei,
Z.J., Khanna, N., Ferreira, P.M., and Haselkorn, M.,
1995, “Rotary ultrasonic face milling of magnesia stabilized
zirconia,” presentation at the American Ceramic Society 97th
Annual Meeting, Cincinnati, OH, April 30–May 3.
<Return to the top>
BOOK CHAPTERS
[1] Ferreira,
P.M, and Pei, Z.J., 1999, “Rotary ultrasonic
machining of ceramics,” A Book Chapter in
Machining of Ceramics and Components, edited by S.
Jahanmir, M. Ramulu and P. Koshy, Marcel Dekker, Inc. New
York, NY.
<Return to the top>
PATENTS
-
U.S.
Patent 6,600,557, July 29, 2003, “Method for the detection
of processing–induced defects in a silicon wafer” (with A.
Stefanescu, H. Erk, and T. Doane).
-
U.S.
Patent 6,114,245, September 5, 2000, “Method of processing
semiconductor wafers,” (with R. Vandamme, and Y. Xin).
-
U.S.
Patent 5,655,956, August 12, 1997, “Rotary ultrasonic
grinding apparatus and process,” (with P.M. Ferreira and N.
Khanna).
-
US Patent Application
(Serial No. 09/512,529), February 24, 2000, “A method of
processing semiconductor wafers,” (with S. Miura, A. Desai,
and H. Erk).
<Return to the top>
BOOK
REVIEWS
-
Pei
Z.J., 2004, “The success of 7–eleven Japan: Discovering
the secrets of the world's best–run convenience chain
stores,”
Journal of the Operational Research Society, Vol. 55,
No. 1, p. 99.
<Return to the top>
DISSERTATIONS
DIRECTED
-
Li,
Z.C., 2006, “Modeling, analysis, and experimental
investigations of grinding processes,” Ph.D. thesis (nine
papers published from this research).
-
Zhang,
J.M., 2006, “Laser scattering techniques for subsurface
damage measurements: system development, experimental
investigation, and theoretical analysis,” Ph.D. thesis (nine
papers published from this research).
-
Sun,
W.P., 2005, “Grinding of silicon wafers: wafer shape model
and its applications,” Ph.D. thesis (six papers published
from this research).
-
Hu,
P., 2004, “Exploration of new territories for rotary
ultrasonic machining,” MS thesis (five papers published from
this research).
-
Wu,
J., 2003, “Soft–pad grinding of wire–sawn silicon wafers:
finite element analysis with designed experiments,” MS thesis
(five papers published from this research).
-
Chidambaram.
S., 2002, “Mathematical models for predicting grinding marks
and chuck shape in semiconductor wafer grinding,” MS thesis
(five papers published from this research).
<Return to the top> |