Dept of Industrial and Manufacturing Systems Engineering
211 Durland Hall
Manhattan, KS 66506-5101
785-532-3436
785-532-3738 fax
E-mail: zpei@ksu.edu
**************************************************************************
Publications
in peer-reviewed transactions and proceedings
Publications
in conference proceedings and industrial magazines
Conference
presentations and invited talks
Research
associates (students, visiting scholars, and post-docs, etc.)
University of Illinois (Urbana), Mechanical Engineering, Ph.D., 1995.
Beijing Institute of Technology, Mechanical Engineering, M.S., 1984.
Zhengzhou Institute of Technology, Mechanical Engineering, B.S., 1982.
8/00-present, Assistant Professor, Kansas State University, Manhattan, KS.
12/99-8/00, Applications Engineer, Saint-Gobain Abrasives, Inc. (Formerly, Norton Company), Worcester, MA.
6/99-11/99, Research Scientist, Strasbaugh, Inc., San Luis Obispo, CA.
10/98-6/99, Mechanical Engineer, GE Panametrics (Formerly, Panametrics, Inc.), Waltham, MA.
8/96-10/98, Process Engineer, MEMC Electronic Materials, Inc., St. Peters, MO.
8/91-8/96, Research Associate, Research/Teaching Assistant, University of Illinois.
5/91-8/91, 11/86-2/88, Research Assistant, Hong Kong Polytechnic University.
3/88-4/91, 10/84-10/86, Lecturer, Teaching Assistant, Beijing Institute of Technology.
IMSE 250, Introduction to Manufacturing Processes and Systems.
IMSE 499, Undergraduate Honor Research.
IMSE 541, Statistical Quality Control.
IMSE 564, Product and Process Engineering.
IMSE 591, Senior Design Project I.
IMSE 592, Senior Design Project II.
IMSE 802B, Manufacturing Processes for Semiconductor Materials and Devices.
IMSE 802B, Lean Manufacturing.
IMSE 804, Graduate Independent Study.
IMSE 892, Graduate Student Seminar.
ASEE (American
Society for Engineering Education).
ASME
(American Society of Mechanical Engineers).
ASPE
(American Society for Precision Engineering).
SME
(Society of Manufacturing Engineers)
Member of the SME NAMRI Scientific Committee, 2003-2006.
Member of the ASME MED Manufacturing Processes Technical Committee, 2003-2004.
Web Liaison of the ASME MED.
Guest Editor for a Special Issue of International Journal of Manufacturing Technology and Management.
Symposium organizer for IMECE 2003,
Washington, DC, November 16-21, 2003.
Member of the 2001 ASPE Annual Meeting Organizing Committee.
Co-chair
for NAMRC 2003 Session 7C: Process Planning, Hamilton, Canada, May 20-23, 2003.
Review proposals for the following agencies:
National Science Foundation.
US Civilian Research and Development Foundation (CRDF).
Review
papers for the following journals:
International
Journal of Advanced Manufacturing Systems.
International Journal of Machine Tools and Manufacture.
International Journal of Modeling
and Simulation.
Journal of the American Ceramic Society.
Journal of Electronic Packaging.
Journal of Manufacturing Science and Engineering.
Journal of Tribology.
Machining Science and Technology.
Precision Engineering (Journal of the International Societies for Precision
Engineering and Nanotechnology).
Review
papers for the following conferences:
2004 IMECE (ASME International Mechanical Engineering Congress & Exposition).
2004 NAMRC (North American Manufacturing Research Conference).
2003 IERC (Industrial Engineering Research Conference).
Review books for:
John Wiley & Sons, Inc.
Journal of the Operational Research
Society (JORS).
NSF
CAREER Award (2004 – 2009).
SME
Research Initiation Award, 2002.
KSU
President’s Faculty Development Award, 2/2002.
KSU
President’s Faculty Development Award, 9/2000.
Member of the Honor Society of Phi Kappa Phi.
Member of the Honor Society of Tau Beta Pi.
Who's Who in America, 58th Edition (2004-2005), 59 Edition (2005-2006).
Who’s Who Among America’s Teachers, 8th Edition (2003-2004).
Senior
Visiting Scholar, Tsinghua University, Beijing, China, 1/2002 – 12/2004.
(with total research funding over $1
million)
[1] NSF (National Science Foundation), “CAREER:
Fundamental research on silicon wafer fine grinding to foster a quantum leap in
manufacturing of silicon wafers” (2/2004 – 1/2009).
[2] NSF (National Science Foundation), “Soft-pad grinding of wire-sawn silicon wafers” (9/2002 – 8/2005). Co-PIs: X.J. Xin (KSU), and S. Ostapenko (University of South Florida).
[3] Argonne National Laboratory/Department of Energy, “Laser-based techniques to detect defects and machining damage in ceramic components and silicon wafers” (6/2003 – 6/2005).
[4] GE Panametrics, “Development of new ultrasonic techniques” (6/2003 – 8/2004).
[5] Strasbaugh, Inc., “Wafer grinding” (6/2003 – 12/2004).
[6] Desano, Inc., “Reengineering business model: improving efficiency, productivity and decreasing cost” (2/2004 – 8/2004).
Completed projects:
[1] SME (Society of Manufacturing Engineers) 2002 Research Initiation Award, “Exploration of new territories for rotary ultrasonic machining” (5/2002 – 12/2003). Co-PI: S. Hanna (KSU)
[2] Argonne National Laboratory/Department of Energy, “Laser scattering measurement of subsurface damage in silicon wafers and ceramic materials” (5/2002 – 12/2002).
[3] GE Panametrics, “Stress analysis on spoolpieces by finite element analysis (FEA)” (9/2003 – 12/2003). Co-PI: X.J. Xin.
[4] Advanced Manufacturing Institute, “Ultrasonic vibration assistant grinding” (7/2003 – 6/2004).
[5] Advanced Manufacturing Institute, “Ultrasonic vibration assistant grinding” (7/2002 – 6/2003). Co-PI: S. Hanna (KSU).
[6] Advanced Manufacturing Institute, “Wafer grinding” (7/2001 – 6/2002).
[7] Advanced Manufacturing Institute, “Wafer grinding” (7/2000 – 6/2001).
[1]
U.S. Patent
6,600,557, July 29, 2003, “Method for the detection of processing-induced
defects in a silicon wafer” (with A. Stefanescu, H. Erk, and T. Doane).
[2]
U.S. Patent
6,114,245, September 5, 2000, “Method of processing semiconductor wafers,”
(with R. Vandamme, and Y. Xin) .
[3]
U.S. Patent
5,655,956, August 12, 1997, “Rotary ultrasonic grinding apparatus and process,”
(with P.M. Ferreira and N. Khanna).
[4]
US Patent
Application (Serial No. 09/512,529), February 24, 2000, “A method of processing
semiconductor wafers,” (with S. Miura, A. Desai, and H. Erk).
[1]
Ferreira, P.M, and Pei,
Z.J., 1999, " Rotary ultrasonic machining of ceramics," A Book
Chapter in Machining
of Ceramics and Components, edited by S. Jahanmir, M. Ramulu and P. Koshy,
Marcel Dekker, Inc. New York, NY.
[1] Sun, W.P., Pei, Z.J., and Fisher, G.R., 2004, “Fine grinding of silicon wafers: machine configurations for spindle angle adjustments,” accepted to appear in International Journal of Machine Tools and Manufacture.
[2] Jiao, Y., Lei, S., Pei, Z.J., and Lee, E.S., 2004, “Fuzzy adaptive networks in machining process modeling: surface roughness prediction for turning operations,” accepted to appear in International Journal of Machine Tools and Manufacture.
[3] Li, Z.C., Jiao, Y., Deines, T.W., Pei, Z.J., and Treadwell, C., “Development of an innovative coolant system for rotary ultrasonic machining,” conditionally accepted to appear in International Journal of Manufacturing Technology and Management.
[4] Sun, X.K., Pei, Z.J., and Xin, X.J., 2004, “Waviness removal in grinding of wire-sawn silicon wafers: three-dimensional finite element analysis,” accepted to appear in International Journal of Advanced Manufacturing Systems.
[5] Sun, X.K., Xin, X.J., and Pei, Z.J., 2004, “Finite element analysis of die-strength testing configurations for thin semiconductor wafers,” accepted to appear in Journal of Electronic Packaging.
[6] Xin, X.J., Pei, Z.J., and Liu, W.J., 2004, “Finite element analysis on soft-pad grinding of wire-sawn silicon wafers,” Journal of Electronic Packaging, Vol. 126, No. 2, pp. 177-185.
[7] Sun, W.P., Pei, Z.J., and Fisher, G.R., 2004, “Fine grinding of silicon wafers: a mathematical model for the wafer shape,” International Journal of Machine Tools and Manufacture, Vol. 44, No. 7-8, pp. 707-716.
[8] Pei, Z.J., Kassir, S., Bhagavat, M., and Fisher, G.R., 2004, “An experimental investigation into soft-pad grinding of wire-sawn silicon wafers,” International Journal of Machine Tools and Manufacture, Vol. 44, No. 2-3, pp. 297-304.
[9] Sun, X.K., Pei, Z.J., Xin, X.J., and Fouts, M., 2004, "Waviness removal in grinding of wire-sawn silicon wafers: 3D finite element analysis with designed experiments," International Journal of Machine Tools and Manufacture, Vol. 44, No. 1, pp. 11-19.
[10] Chidambaram, S., Pei, Z.J., and Kassir, S., 2003, “Fine grinding of silicon wafers: a mathematical model for grinding marks,” International Journal of Machine Tools and Manufacture, Vol. 43, No. 15, pp. 1595-1602.
[11] Chidambaram, S., Pei, Z.J., and Kassir, S., 2003, “Fine grinding of silicon wafers: a mathematical model for the chuck shape,” International Journal of Machine Tools and Manufacture, Vol. 43, No. 7, pp. 739-746.
[12] Pei, Z.J., Xin, X.J., Liu, W.J., 2003, “Finite element analysis for grinding of wire-sawn silicon wafers: a designed experiment,” International Journal of Machine Tools and Manufacture, Vol. 43, No. 1, pp. 7-16.
[13]
Pei, Z.J., 2002, “A
Study on surface grinding of 300 mm silicon wafers,” International Journal of Machine Tools and
Manufacture, Vol. 42, No. 3, pp. 385-393.
[14]
Pei, Z.J., and
Strasbaugh, A., 2002, “Fine grinding of silicon wafers: designed
experiments,” International Journal of Machine Tools and Manufacture, Vol. 42, No. 3, pp. 395-404.
[15]
Liu, W.J., Pei, Z.J., and Xin, X.J., 2002, “Finite element analysis for grinding and lapping
of wire-sawn silicon wafers,” Journal of
Materials Processing Technology, Vol. 129, No. 1-3, pp. 2-9.
[16]
Hu, P., Zhang,
J.M., Pei, Z.J., Treadwell, C., 2002, “Modeling of material
removal rate in rotary ultrasonic machining: designed experiments,” Journal of Materials Processing Technology, Vol. 129,
No. 1-3, pp. 339-344.
[17]
Pei, Z.J., and
Strasbaugh, A., 2001, “Fine grinding of silicon wafers,” International
Journal of Machine Tools and Manufacture, Vol. 41, No. 5, pp. 659-672.
[18]
Pei, Z.J., and Ferreira, P.M., 1999, "An experimental
investigation of rotary ultrasonic face milling," International Journal of
Machine Tools and Manufacture, Vol.
39, No. 8, pp. 1327-1344.
[19]
Pei, Z.J., Billingsley, S.R., and Miura, S, 1999,
"Grinding-induced subsurface cracks in silicon wafers," International
Journal of Machine Tools and Manufacture, Vol. 39, No. 7, pp. 1103-1116.
[20]
Pei, Z.J, and Ferreira, P.M., 1998, "Modeling of
ductile mode material removal in rotary ultrasonic machining,"
International Journal of Machine Tools and Manufacture, Vol. 38, No. 10-11, pp.
1399-1418.
[21] Pei, Z.J., Prabhakar, D., Ferreira, P.M., and Haselkorn, M., 1995, "A mechanistic approach to the prediction of material removal rates in rotary ultrasonic machining," Journal of Engineering for Industry, Vol. 117, No. 2, pp. 142-151.
[22] Pei, Z.J., Ferreira, P.M., Kapoor, S.G., and Haselkorn, M., 1995, "Rotary ultrasonic machining for face milling of ceramics," International Journal of Machine Tools and Manufacture, Vol. 35, No. 7, pp. 1033-1046.
[23] Pei, Z.J., Ferreira, P.M., and Haselkorn, M., 1995, "Plastic flow in rotary ultrasonic machining of ceramics," Journal of materials Processing Technology, Vol. 48, No. 1-4, pp. 771-777.
[24] Rubenstein, C., Lau, W.S., Pei, Z.J., and Wang, M., 1989, "The torque and thrust arising from contact at the lips in spade drilling of ductile metals," International Journal of Machine Tools and Manufacture, Vol. 29, No. 3, pp. 453 -467.
[1] Pei, Z.J., Fisher, G.R., and Strasbaugh, A., 2004, “Fine grinding of silicon wafer: benefits and technical barriers,” Transactions of the North American Manufacturing Research Institution of SME, Vol. 32, pp. 479-488.
[2] Zhang, J.M., Sun, J.G., and Pei, Z.J., 2004, “Optical transmission properties of silicon wafers: experimental study,” Transactions of The North American Manufacturing Research Institution of SME, Vol. 32, pp. 471-478.
[3] Li, Z.C., Jiao, Y., Deines, T.W., Pei, Z.J., and Treadwell, C., 2004, “Experimental study on rotary ultrasonic machining (RUM) of poly crystalline diamond compacts (PDC),” CD-ROM Proceedings of the 13th Annual Industrial Engineering Research Conference (IERC-2004), Houston, TX, May 15-19, 2004.
[4] Namala, S., Collins, R., and Pei, Z.J., 2004, “Implementing lean thinking concepts in a high product mix manufacturing organization,” CD-ROM Proceedings of the 13th Annual Industrial Engineering Research Conference (IERC-2004), Houston, TX, May 15-19, 2004.
[5] Zhang, J.M., Sun, J.G., and Pei, Z.J., 2003, "Application of laser scattering on detection of subsurface damage in silicon wafers," CD-ROM Proceedings of the International Mechanical Engineering Congress and Exposition 2003 (IMECE 2003), Washington, DC, November 16-21.
[6] Jiao, Y., Wu, J., Lei, S., Pei, Z.J., and Lee, S., 2003, “Application of fuzzy adaptive networks in manufacturing: waviness removal in grinding of wire-sawn silicon wafers,” CD-ROM Proceedings of the International Mechanical Engineering Congress and Exposition 2003 (IMECE 2003), Washington, DC, November 16-21.
[7] Zhang, J.M., Pei, Z.J., and Sun, J.G., 2003, “Calibration tests of laser scattering in subsurface damage measurements,” Transactions of the North American Manufacturing Research Institution of SME, Vol. 31, pp. 563-570, also SME Technical Paper, MS03-213, Society of Manufacturing Engineers, Dearborn, MI.
[8] Zhang, J.M., Pei, Z.J., and Sun, J.G., 2003, “Experimental study on set-up parameters of laser scattering system,” CD-ROM Proceedings of the 12th Annual Industrial Engineering Research Conference (IERC-2003), Portland, OR, May 18-20.
[9]
Hu, P., Wilson,
C., and Pei, Z.J., 2003, “An experimental investigation into
machinability of a refractory composite material,” CD-ROM Proceedings of the 12th Annual Industrial Engineering
Research Conference (IERC-2003), Portland, OR, May 18-20.
[10]
Hanna, S., Deines, T., Menon, S., Lei, S., and Pei,
Z.J., 2003, “Experimental assessment of machining processes for a new
composite material,” CD-ROM Proceedings of the 12th Annual
Industrial Engineering Research Conference (IERC-2003), Portland, OR, May 18-20.
[11] Wu. J., Sun, X.K., Pei, Z.J., and Xin, X.J., 2003, “Soft-pad grinding of wire-sawn silicon wafers: finite element analysis using 25 factorial design,” CD-ROM Proceedings of the 12th Annual Industrial Engineering Research Conference (IERC-2003), Portland, OR, May 18-20.
[12]
Jiao, Y., Pei, Z.J., Lei, S., and, Lee, E.S., 2003, “Fuzzy adaptive networks
in the modeling and forecasting of manufacturing processes,” CD-ROM Proceedings of the 12th Annual
Industrial Engineering Research Conference (IERC-2003), Portland, OR, May
18-20.
[13] Pei, Z.J., and Strasbaugh, A., 2002, “Fine grinding of silicon wafers: grinding marks,” CD-ROM Proceedings of the International Mechanical Engineering Congress and Exposition 2002 (IMECE 2002), Vol. 2, New Orleans, LA, November 17-22.
[14] Xin, X.J., Pei, Z.J., and Liu, W.J., 2002, “Finite element analysis on soft-pad grinding of wire-sawn silicon wafers,” CD-ROM Proceedings of the International Mechanical Engineering Congress and Exposition 2002 (IMECE 2002), Vol. 2, New Orleans, LA, November 17-22.
[15] Zhang, J.M., Pei, Z.J., and Sun, J.G., 2002, "Measurement of subsurface damage in silicon wafers," Proceedings of the 6th International Conference on Progress of Machining Technology (ICPMT6), Xi'an, Shanxi, China, September 10-14, pp. 715-720.
[16] Chidambaram, S., Pei, Z.J., and Yu, Q.X., 2002, “Back grinding of silicon wafers,” Proceedings of the 6th International Conference on Progress of Machining Technology (ICPMT6), Xi'an, Shanxi, China, September 10-14, pp. 301-306.
[17]
Zhang, J.M., Sun, J.G., and Pei, Z.J., 2002,
"Subsurface damage measurement in silicon wafers by laser
scattering," Transactions of
the North American Manufacturing Research Institution of SME, Vol. 30,
pp. 535-542, also SME Technical Paper,
MS02-173, Society of Manufacturing Engineers, Dearborn, MI.
[18] Pei, Z.J., and Fisher, G., 2001, “Surface grinding in silicon wafer manufacturing,” Transactions of the North American Manufacturing Research Institution of SME, Vol. 29, pp. 279-286, also SME Technical Paper, MR01-271, Society of Manufacturing Engineers, Dearborn, MI.
[19] Pei, Z.J., Prabhakar, D., Ferreira, P.M., and Haselkorn, M., 1995, "Rotary ultrasonic drilling and milling of ceramics," Ceramic Transactions, Vol. 49, Manufacture of Ceramic Components, American Ceramic Society, Westerville, OH, pp. 185-196.
[20] Pei, Z.J., Khanna, N., and Ferreira, P.M., 1995, "An investigation into rotary ultrasonic machining of structural ceramics -- a review," Ceramic Engineering and Science Proceedings, Vol. 16, No. 1, pp. 259-278.
[21] Khanna, N., Pei, Z.J., and Ferreira, P.M., 1995, "An experimental investigation of rotary ultrasonic grinding of ceramic disks," Technical Papers of the North American Manufacturing Research Institution of SME, pp. 67-72, also SME Technical Paper, MR95-141, Society of Manufacturing Engineers, Dearborn, MI.
[22]
Prabhakar, D., Pei,
Z.J., Ferreira, P.M., and Haselkorn, M., 1993, "A theoretical model
for predicting material removal rates in rotary ultrasonic machining of
ceramics," Transactions of the North American Manufacturing Research
Institution of SME, Vol. 21, pp. 167-172.
[1]
Li, Z.C., Jiao, Y., Deines, T.W., Pei, Z.J., and Treadwell, C., “Rotary
ultrasonic machining (RUM) on ceramic matrix composites (CMC): Designed
experiments,” accepted to appear in the Proceedings of the Fifth International
Conference on High Temperature Ceramic Matrix Composites (HTCMC-5), Seattle,
WA, September 12-16, 2004.
[2]
Pei, Z.J., Xin, X.J., and Sun, X.K., 2004, “Soft-pad
grinding of 300 mm wire-sawn silicon wafers: effects of soft pad parameters,”
Proceedings of the 6th International Conference on Frontiers of Design and Manufacturing,
Xi’an, China, June 21–23.
[3]
Zeng, W.M., Li, Z.C., Pei, Z.J., and Treadwell, C., 2004, “Rotary
ultrasonic machining of advanced ceramics: effects of coolant,” Proceedings of
the 6th
International Conference on Frontiers of Design and Manufacturing, Xi’an,
China, June 21–23.
[4]
Li, Z.C., Treadwell, C., and Pei, Z.J., 2004, “Drilling
small holes in hard-to-machine materials by rotary ultrasonic machining,”
CD-ROM Proceedings of WESTEC Conference – New Frontiers in Manufacturing
Technology, Los Angeles, CA, March 22-25, also SME Technical Paper, TP04PUB137, Society of Manufacturing Engineers,
Dearborn, MI.
[5]
Pei, Z.J., Xin, X.J., Liu, W., Wu, J., Sun,
X.K., Simmelink, K., and Fouts, M., 2004, “Soft-pad grinding of wire-sawn
silicon wafers: progress report,” CD-ROM
Proceedings of the 2004 NSF Design, Service and Manufacturing Grantees and
Research Conference, Dallas, TX, January 5-8.
[6]
Pei, Z.J., 2003, “Experience of using multimedia
during classroom lectures,” CD-ROM
Proceedings of the 38th ASEE Midwest
Section Conference and Workshops, Rolla, MO, September 10-12.
[7]
Pei, Z.J., and Mayfield, C., 2003, “Extension of classroom
to a local manufacturing company,” CD-ROM
Proceedings of the 38th ASEE Midwest
Section Conference and Workshops, Rolla, MO, September 10-12.
[8]
Xin, X.J., Sun, X.K., and Pei, Z.J., 2003,
“Grinding of 300 mm silicon wafers: finite element analysis of waviness
removal,” Proceedings of the
International Conference on Leading Edge Manufacturing in 21th Century (LEM21),
Niigata, Japan, November 3-6, 2003.
[9]
Treadwell, C, and Pei, Z.J., 2003, “Machining
ceramics with rotary ultrasonic machining,” Ceramic
Industry, June 2003, pp. 39-42.
[10]
Pei, Z.J., Strasbaugh, A., and Puthanangady, T.,
2003, “Thermal aspects in grinding of silicon wafers,” Proceedings of the NSF Workshop on Research Needs in Thermal Aspects of
Material Removal Processes, Stillwater, OK, June 10-12, pp. 375-380.
[11]
Hu, P., Zhang, J.M., Jiao, Y., Pei, Z.J., and
Treadwell, C., 2003, “Experimental investigation on coolant effects in rotary
ultrasonic machining,” Proceedings of the NSF
Workshop on Research Needs in Thermal Aspects of Material Removal Processes,
Stillwater, OK, June 10-12, pp. 340-345.
[12]
Y.
Jiao, P. Hu, Z.J. Pei, S. Lei, and E.S. Lee, 2003, “Application of fuzzy adaptive networks in
manufacturing: prediction of material removal rate in rotary ultrasonic
machining,” Proceedings of ANNIE 2003 (Artificial Neural Networks In
Engineering), St. Louis, MO, November 2-5.
[13]
Wu, J., Liu,
W.J., Sun, X.K., Xin, X.J., and Pei,
Z.J., 2003, “Soft-pad grinding of
wire-sawn silicon wafers: finite element analysis using 24 factorial
design,” CD-ROM Proceedings of the 2003 NSF Design, Service and Manufacturing
Grantees and Research Conference, Birmingham, AL, January 6-9.
[14]
Deines, T., Hanna, S., Pei, Z.J., and Wilson,
C., 2002, “Experience
of innovations in a manufacturing process laboratory course,” CD-ROM
Proceedings of the 37th ASEE Midwest Section Conference and Workshops,
Norman, OK, September 12-13.
[15]
Pei, Z.J., Hanna, S., Deines, T., and Lei, S., 2002, “Experience in technology-based instruction and active
learning for a manufacturing course,” Transactions of the Committee of
Manufacturing Engineering Chairs/Coordinators (COMEC), Vol. 1, pp. 38-45, also
SME Technical Paper, ED02-259, Society of Manufacturing Engineers, Dearborn,
MI.
[16]
Xin, X.J., Liu, W.J., and Pei, Z.J., 2002,
“Modeling of waviness reduction in silicon wafer grinding by finite element
method,” Proceedings of the International Conference on Modeling and Analysis of
Semiconductor Manufacturing (MASM 2002), Tempe, AZ, April 10-12, pp. 24-29.
[17]
Chidambaram,
S. and Pei,
Z.J., 2002, “A predictive model for grinding mark patterns
in semiconductor wafer grinding,” Proceedings
of the International Conference on Modeling and Analysis of Semiconductor
Manufacturing (MASM 2002), Tempe, AZ, April 10-12, pp. 30-35.
[18]
Chidambaram, S. and Pei,
Z.J., 2001, “A study of grinding marks in semiconductor wafer grinding,” Proceedings of the
16th American Society for Precision Engineering Annual Meeting, Arlington,
VA, November 10–15, pp. 393-396.
[19]
Fisher, G., and Pei, Z.J.,
1998, “Challenges for 300 mm polished wafer manufacturers,” Silicon Wafer Symposium, Portland, OR, Sept 28-29, pp.
J1-J9.
[20]
Tricard, M.,
Kassir, S., Herron, P., and Pei, Z.J., 1998, “New abrasive trends in
manufacturing of silicon wafers,” Silicon Machining Symposium, American
Society For Precision Engineering, St. Louis, MO, April.
[21] Pei, Z.J., Khanna, N., and Ferreira, P.M., 1995, "A study on material removal mechanisms in rotary ultrasonic machining of ceramics," Proceedings of the 11th International Symposium for ElectroMachining, ISEM-XI, Lausanne, Switzerland, April 17-21, pp. 839-848.
[22] Shirkey, P.R., Pei, Z.J., and Ferreira, P.M., 1994, "Application of stochastic geometry in characterizing random phenomena in material removal processes," Proceedings of the First S. M Wu Symposium on Manufacturing Science, Evanston, IL, May 27-28, pp. 177-183.
[23] Pei, Z.J., and Lau, W.S., 1989, "A new model of v-cutting," Proceedings of the Fourth International Conference on Metal Cutting, Non-Conventional Machining and Their Automation, April, Beijing, China, Vol. 1, pp. C197-202.
[24] Zhou, L.Y., Yu, Q.X., and Pei, Z.J., 1989, "Failure mechanism of the coated carbide tool," Proceedings of the Fourth International Conference on Metal Cutting, Non-Conventional Machining and Their Automation, Beijing, China, April, Vol. 1, pp. C203-207.
[25] Rubenstein, C., Lau, W.S., Pei, Z.J., and Wang, M., 1989, "Evaluation of cutting forces in spade drill," Proceedings of the Fourth International Conference on Metal Cutting, Non-Conventional Machining and Their Automation, Beijing, China, April, Vol. 2, pp. C245-262.
[26] Wang, Y.M., Pei, Z.J., and Shen, W.Q., 1987, "On the cutting performance of new types of home-made HSS," Proceedings of the Third International Conference on Metal Cutting, Non-Conventional Machining and Their Automation, Nanjing, China, May, pp. 1-13.
[1]
Pei, Z.J., 2003, “Fine grinding of silicon wafer:
benefits and challenges,” invited talk to Saint-Gobain Abrasives, Inc.,
Worcester, MA, August 7.
[2]
Pei, Z.J., Hanna, S., and Liu, D., 2002,
“Interventions and Kaizen events,” two-week long training at Shunde Special
Transformer works, Shunde, Guangdong, China, July 29 – August 9.
[3]
Pei, Z.J., and Hanna, S., 2002, “Interventions,” invited talk to Beijing Zhongli Chemical Fiber Machinery
Co., Ltd., Beijing, China, July 26.
[4] Pei, Z.J., 2002, “Technology-based instruction and active learning for a manufacturing course,” invited talk to the Industrial Engineering Department at Tsinghua University, Beijing, China, July 25.
[5] Pei, Z.J., 2002, “Challenges in fine grinding of silicon wafers,” invited talk to the Industrial Engineering Department at Tsinghua University, Beijing, China, July 25.
[6] Pei, Z.J., 2002, “Process-induced subsurface damage and waviness in silicon wafers,” invited talk to the Manufacturing Metrology Division of the Manufacturing Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, MD, May 17.
[7]
Pei, Z.J., and Strasbaugh, A., 2002, “Fine
grinding of silicon wafers: past and future,” presentation at the ASPE 2002
Spring Topical Meeting –
Progress in Precision, Raleigh, NC, April 17-18.
[8]
Chidambaram, S., and Pei,
Z.J., 2001, “Back grinding of silicon wafers: a review,”
presentation at the 103rd American Ceramic Society Annual Meeting and
Exposition, Indianapolis, IN, April 22-25.
[9] Pei, Z.J., Khanna, N., Ferreira, P.M., and Haselkorn, M., 1995, "Rotary ultrasonic face milling of magnesia stabilized zirconia," presentation at the American Ceramic Society 97th Annual Meeting, Cincinnati, OH, April 30-May 3.
Zinc Li
(Ph.D. student)
Vicky Lu (Ph.D. student, starting Aug. 2004)
Wangping
Sun (Ph.D. student)
Budong
Yang (Ph.D. student, currently conducting thesis research at Denaso, Inc.)
Jenny Zhang (Ph.D. student, currently conducting thesis research at
Argonne National Laboratory)
Xiaohong Zhang (Ph.D. student, starting Aug. 2004)
Nikhil Churi (MS student)
Ping Hu (MS student, conducted research at GE
Panametrics, Inc. for one year)
Weimin Zeng (visiting scholar, Huaqiao
University, Xiamen, China)
Kelli Simmelink (undergraduate,
supported by NSF REU supplement)
Mandy
Fouts (teacher at Bergman Elementary school, supported by NSF RET
supplement)
Former
Associates:
Soma
Chidambaram (MS student, graduated in Dec. 2002)
Jessie
Wu (MS student, graduated in Dec. 2003)
Wenjie
Liu (visiting scholar, currently a Ph.D. student in Mechanical Engineering at
KSU)
Dr.
Zhongxin Xu (visiting scholar, Tsinghua University, Beijing, China)
Dr.
June Jiao (post-doc researcher, currently with University of Massachusetts)
Dr.
Xuekun Sun (post-doc researcher, currently with Syracuse University)
Dr. Rachel Zhao (Research scientist, currently
working in industry)
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